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FAX: 81-798-67-5038

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ROKKO ELECTRONICS Co., Ltd.

Zipp: 663-8105
8-5, Nakajima-cho, Nishinomiya-city, Hyogo, Japan



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▼ Monitor wafer reclaiming




Monitor wafer reclaiming

This is recycling services enables monitor wafers used in the semiconductor process to be used again by refining their conditions to the original quality.
Through the services, monitor wafers can be used repeatedly to reduce material costs.
Wafer size:
3 inch
4 inch
5 inch
6 inch
Film stripping
reclaim
Selected recipe
reclaim  
Incoming inspection
reclaim
Polishing

Classify thickness and film type
 
 
reclaim
Shipping
reclaim
Final inspection
reclaim
Cleaning
 
Particle,Metal contamination,Thickness
 
RCA cleaning



New equipment:Wafer sorter for resistivity・P/N・thickness
● Wafer sorter for resistivity・P/N・thickness

Wafer sorter for resistivity・P/N・thickness
For 4,5,6,8 inch
● Wafer sorter for resistivity・P/N・thickness

Wafer sorter for resistivity・P/N・thickness
Measurable resistivity:1.0m~3.0MΩ・cm


■ Tools and Equipment
Film sorting   Film stripping

Film sorting
Wafers are sorted by different types of films by well experienced operators.

Film stripping
Films on wafers are removed by the selected chemicals.
Thickness sorting
  Wafer mounting

Thickness sorting
Wafers are sorted by thickness after film stripping.

Wafer mounting
Wafers are mounted on a ceramic plate for polishing.
Batch system polishing machine
  Wafer demounting

Batch system polishing machine
Multiple wafers are polished concurrently.

Wafer demounting
Wafers are demounted from a ceramic plate after polishing.
RCA cleaning   Particle counter

RCA cleaning
Wafers are cleaned to remove metal contaminations and particles.

Particle counter
This tool inspects particles on polished wafer surfaces.
Final inspection   Total reflection x-ray fluorescence analysis tool TREX610

Final inspection
Wafers are inspected to comply with customer’s specifications.

Total reflection x-ray fluorescence analysis too
Measurable elements: 12 elements (S, Cl, K, Ca, Ti, Cr,Mn,Fe,Co,Ni,Cu,Zn)
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ROKKO Electronics co., ltd.
TEL : 81-798-65-4508
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