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Please contact ROKKO at
Attention: Overseas Sales Dept.
TEL: 81-798-65-4508
FAX: 81-798-67-5038
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Job Opportunities
Please click below
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ROKKO ELECTRONICS Co., Ltd.
Zipp: 663-8105
8-5, Nakajima-cho, Nishinomiya-city, Hyogo, Japan
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■ 4,
6, and 8-inch double-sided polishing
⇒ ultra-flattening process |
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■ 4-inch
Silicone Double-Sided Polishing Precision
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4-inch silicon TTV precision
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Number of N
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25 pcs
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Average
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0.234um
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σ
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0.032um
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MAX
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0.294um
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MIN
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0.265um
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Perimeter exclusion area
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3mm
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4-inch silicon, surface roughness (Sa)
accuracy
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center
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1/2R
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outer
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Number of N
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25 pcs
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Average
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0.235nm
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0.241nm
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0.242nm
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σ
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0.028nm
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0.019nm
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0.025nm
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MAX
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0.332nm
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0.267nm
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0.299nm
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MIN
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0.2nm
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0,207nm
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0.186nm
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viewing angle
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88 X 88um
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Measuring device
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Zygo Newview NX2
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4-inch silicon SBIR precision
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Number of N
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25 pcs
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Average
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0.202um
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σ
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0.017um
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MAX
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0.224um
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MIN
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0.166um
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Perimeter exclusion area
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3mm
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site size
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12 X 12mm
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offset
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0 X 0mm
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4-inch silicon SFQR precision
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Number of N
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25 pcs
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Average
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0.148um
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σ
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0.011um
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MAX
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0.169um
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MIN
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0.128um
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Perimeter exclusion area
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3mm
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site size
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12 X 12mm
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offset
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0 X 0mm
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