8-inch wafers can also be reclaimed.
Monitor
wafer reclaiming
This is recycling services
enables monitor wafers used in the semiconductor process to
be used again by refining their conditions to the original
quality.
Through the services, monitor wafers can be used repeatedly
to reduce material costs.
Wafer size：
３ inch
４ inch
５ inch
６ inch
８ inch
Film
stripping
Selected recipe
Incoming
inspection
Polishing
Classify thickness and film type
Shipping
Final
inspection
Cleaning
Particle,Metal contamination,Thickness
RCA cleaning
■ New equipment：Wafer
sorter for resistivity・P/N・thickness
● Wafer sorter for resistivity・P/N・thickness
For 4,5,6,8 inch
● Wafer sorter for resistivity・P/N・thickness
Measurable resistivity：1.0m～3.0MΩ・cm
■ Tools and Equipment
Film sorting
Film stripping
Wafers are sorted by different types of films by well experienced
operators.
Films on wafers are removed by the selected chemicals.
Thickness sorting
Batch system polishing
machine
Wafers are sorted by thickness after film stripping.
Multiple wafers are polished concurrently.
RCA cleaning
Particle counter
Wafers are cleaned to remove metal contaminations and particles.
We inspect the particles in the polished wafer.
Flatness measuring device
Final inspection
We will measure the BOW, WARP, and TTV of the polished wafer
Wafers are inspected to comply with customer’s specifications.
Total Internal Reflection
X-ray Fluorescence Analyzer 【TXRF】
Inductively coupled plasma
mass spectrometer
【ICP-MS】
※Contract inspection services available.
Metal contamination and full-surface sweep measurement possible《[S
Cl K Ca Ti Cr Mn Fe Co Ni Cu Zn》
※Contract inspection services available.
Metal contamination and various metals can be measured
